SCR3160CSN (Closed Loop Control)
●Closed-loop control ●Equipped with absolute encoder ●Realizes battery-less operation
This is a three-axis cylindrical coordinate clean robot for super clean rooms. It is a new type of single-arm robot compatible with 2-inch to 300mm wafers, achieving low cost, high-speed transport, and no loss of step. It employs closed-loop control that prevents loss of step even under rapid load fluctuations and acceleration, further enhancing the reliability of the robot. By incorporating an absolute encoder, it can grasp its current position and reduce the time required for operation after returning to the origin. It is equipped with a mechanical multi-turn absolute sensor that does not require a battery. It is compatible with conventional models (mounting compatibility and performance compatibility), allowing for easy replacement. The high rigidity arm has a third joint equivalent to 3kgf (including wrist block, chuck, and workpiece). Arm variations: 100mm, 130mm, 160mm, 200mm. Depending on the device layout, it is possible to choose a mounting method for base type or flange type devices. A Bernoulli chuck can be mounted (optional).
- Company：ジェーイーエル
- Price：Other
